This way
<html xmlns="http://www.w3.org/1999/xhtml">
<head>
    <title></title>
    <script type="text/javascript">
        function CheckUnCheckAll(chkMain) {
            var chks = document.getElementsByTagName("input");
            for (var i in chks) {
                if (chks[i].type == "checkbox") {
                    chks[i].checked = chkMain.checked;
                }
            }
        }
    </script>
</head>
<body>
    <form id="form1" runat="server">
    <input type = "checkbox" id = "main" onclick = "CheckUnCheckAll(this)" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    <input type = "checkbox" />
    </form>
</body>
</html>
 
It works in all browsers